Contact us: + 45 6966 3060
PolarTech - Mukkerten 21 - DK - 6715 Esbjerg N

Semiconductor Industry

Reduction in cleaning time and better result…

Manufacturers of semiconductor devices and polycrystalline silicon are using various solutions in their decontamination process of different tooling. Especially in production equipment where depositions occurs must be kept extremely clean to prevent contamination. Solvents, acids, wire brushing, scrapers are just some of the methods for cleaning.

Polartech dry ice blasting provides a solution for the cleaning applications both as manual systems as well as robotic solutions. Using PolarTech technology means reducing cleaning time and costs and at the same time increasing product quality and reduced downtime in production.

PolarTech technology is a nontoxic process and minimizes or even substitutes completely the use of solvents and chemicals hence it is far safer to use for the operator and is environmentally friendly. Dry ice blasting is non-abrasive meaning you are not doing any damage to equipment or electronics.

The technology is not generating secondary waste. Faster cleaning and cleaning in-situ (no need for dismantling) means that overall cleaning costs are reduced radically. The result is a fast payback on your ROI.



  • Removal of build-up in
  • CVD reactors.
  • Diffusion parts.
  • Polish parts.
  • Photo parts.
  • Etch parts.

Customer Benefits

    • Increase of equipment utilization (up to 35 %).
    • Improvement of probe yield.
    • Lower total particle counts.
    • No chemicals / solvents.
    • Cleaning in situ (no need for dismantling).
    • No secondary waste generated.
    • Dry cleaning process.
    • Non-abrasive (no damage to equipment / tooling).
    • Reduce downtime.
    • Environmentally friendly.
    • Fast return on investment.

    PDF iconSemiconductor Industry

    Dry ice blasting - cleaning technology of the future

    Cleaning with dry ice has been used for several years. More commonly used are dry ice in pellet form or blocks using a shaving technology. Both technologies are subject to high investment costs and high running costs. These factors have so far been the obstacles for establishing themselves as a general cleaning process in the industries.

    PolarTech´s patented technology is the solution to the problems above.

    Head office - Denmark

    Polartech ApS
    Bondovej 14
    5250 Odense SV
    +45 2872 0760


    On our Youtube profile, you can see more movies of our cleaning process.

    Click here to access the profile